发明名称 PASSIVATING APPARATUS
摘要 A passivating apparatus which makes uniform a temperature distribution of a workpiece, is suitable for the mass production of a workpiece, and can be applied not only to metal tubes but also to various kinds of workpieces. After a furnace body (1) is operated, a heated inert gas is supplied, with its temperature distribution kept uniform, into a retort (treating tubular body) (2) via a branch pipe (10) (temperature uniforming mechanism). A metal tube (20) (treated tubular body) is held by a holder under a communication state, and the holder is stored inside the retort (2) by a winch (32) (transfer mechanism). Then, a pre-heated treating gas is supplied into the metal tube (20). In this way, a uniform passivationfilm can be formed on the metal tube (20) with high reproducibility. Electric heaters (4a-41) (temperature control unit), an inert gas supply unit (6A) (inert gas control unit), treating gas supply units (6Ba, 6Bb) (treating gas control unit) and the winch (32) of the furnace body (1) are program-controlled by the central control unit not shown, through a magnetic recording medium, and remote treatment, automatic treatment, mass treatment, etc, of the metal tube (20) can be accomplished.
申请公布号 WO9214857(A1) 申请公布日期 1992.09.03
申请号 WO1992JP00161 申请日期 1992.02.18
申请人 OSAKA SANSO KOGYO KABUSHIKI-KAISHA 发明人 OHMI, TADAHIRO;NAKAHARA, YOSHIYUKI;KIJIMA, TAKAHIKO;SAKANAKA, TAKASHI;OHTA, EIJI;KUNIMOTO, YUTAKA
分类号 C23C8/12;C23C8/10;H01L21/31 主分类号 C23C8/12
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