| 摘要 |
<p>PURPOSE:To refine silane by precisely removing hydrogenated material such as phosphine, arsine, diborane, etc., included as minute impurities from the source silane gas. CONSTITUTION:Minute impurities such as phosphine, etc., are selectively and precisely removed from the source silane gas bringing a treating agent essentially comprising a mixture of zinc oxide and alumina into contact with the source silane gas. Thus, the silane is well refined.</p> |
