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发明名称
DRY CLEANING METHOD OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0855830(A)
申请公布日期
1996.02.27
申请号
JP19940189675
申请日期
1994.08.11
申请人
NIPPON SANSO KK
发明人
KOBAYASHI KAZUMI
分类号
B08B7/00;C23F1/12;C23G5/032;H01L21/304;H01L21/306;(IPC1-7):H01L21/304
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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MOTOR STATOR
