发明名称 Lateraler MOSFET mit Kontaktstruktur
摘要 A geometry for the metal contacts in a lateral MOSFET is disclosed. The cross-sectional shape of the metal contacts, which is usually six-sided but may also be a parallelogram, maximizes the cross-sectional area of the contacts while maintaining a required clearance from the gate layer and a required overhang of the lines in an overlying metal layer. <IMAGE>
申请公布号 DE69417798(T2) 申请公布日期 1999.08.26
申请号 DE1994617798T 申请日期 1994.05.12
申请人 SILICONIX INC. 发明人 WILLIAMS, RICHARD K.
分类号 H01L29/41;H01L21/336;H01L29/417;H01L29/423;H01L29/78 主分类号 H01L29/41
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