APPARATUS FOR WAFER INSPECTION

摘要

A wafer inspection apparatus is provided to exchange correctly a lamp according to an exchanging period by checking periodically an operational period of the lamp and the remaining time of the lamp. A stage(16) is provided to load an inspecting target thereon. An object lens part(24) is installed toward the inspection target. A lamp unit(26) includes a lamp(26a) for providing light to the inspecting target. An eyepiece part is used for inspecting a phase of the inspecting target. The lamp unit includes a timer(26d) to check an operational period of the lamp. The timer includes a reset button. The timer further includes a display part to display the remaining time.