发明名称 Automated processing liquid drain system
摘要 The present invention discloses an automated processing liquid drain system that utilizes a series of processing liquid drain tanks and at least two waste collection tanks that are in fluid communication with the processing liquid drain tanks such that when a high liquid level sensor mounted on the drain tank is activated, the spent processing liquid collected from processing machines can be transferred to one of the waste collection tanks and thus preventing overflow in the processing liquid drain tanks.
申请公布号 US6148838(A) 申请公布日期 2000.11.21
申请号 US19970086049 申请日期 1997.05.28
申请人 VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION 发明人 TSAY, JYH-YEONG;CHEN, YUNG-CHENG
分类号 B67D7/02;B67D7/32;B67D7/78;G05D9/12;(IPC1-7):F16K31/02;F16K31/12 主分类号 B67D7/02
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