摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride (AlN) grain capable of being sintered into aluminum nitride sintered powder and a aluminum nitride sintered compact at a remarkably low temperature compared to a conventional method and a method of manufacturing the same. <P>SOLUTION: The aluminum nitride grain is prepared by incorporating a colloidal silica dispersion in aluminum nitride powder and the content of silicon dioxide originating in colloidal silica is 1-10 wt.% to aluminum nitride powder. The method of manufacturing aluminum nitride is carried out by spray-drying slurry containing the colloidal silica dispersion and the aluminum nitride powder. The aluminum nitride powder is obtained by firing the aluminum nitride grain and the aluminum nitride sintered compact is obtained by molding the aluminum nitride grain with a dry press and firing. <P>COPYRIGHT: (C)2005,JPO&NCIPI |