发明名称 ALUMINUM NITRIDE GRAIN, METHOD OF MANUFACTURING THE SAME AND UTILIZATION
摘要 <P>PROBLEM TO BE SOLVED: To provide an aluminum nitride (AlN) grain capable of being sintered into aluminum nitride sintered powder and a aluminum nitride sintered compact at a remarkably low temperature compared to a conventional method and a method of manufacturing the same. <P>SOLUTION: The aluminum nitride grain is prepared by incorporating a colloidal silica dispersion in aluminum nitride powder and the content of silicon dioxide originating in colloidal silica is 1-10 wt.% to aluminum nitride powder. The method of manufacturing aluminum nitride is carried out by spray-drying slurry containing the colloidal silica dispersion and the aluminum nitride powder. The aluminum nitride powder is obtained by firing the aluminum nitride grain and the aluminum nitride sintered compact is obtained by molding the aluminum nitride grain with a dry press and firing. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005082460(A) 申请公布日期 2005.03.31
申请号 JP20030317996 申请日期 2003.09.10
申请人 MITSUI CHEMICALS INC 发明人 HARADA ISAO;OMUKAI TOSHIO
分类号 C04B35/581;H01L23/373 主分类号 C04B35/581
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