| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treating device that can efficiently treat substrates. SOLUTION: A substrate transport mechanism 11 provided with arms 20 is constituted so that the interval d between adjacent substrates in a carrier when the carrier is transported by means of a transport mechanism for throw-in/ delivery and the half-pitch interval d/2 when the mechanism 11 transports substrates is changed. The transport mechanism 11 can collectively transport all substrates W housed in two carriers and, at the same time, can collectively deliver and receive the substrates W to and from individual treating sections. Consequently, the substrates W can be treated efficiently. |
