| 摘要 |
PROBLEM TO BE SOLVED: To carry out an optimal inspection of an inspection object by minimizing a dispersion of an incident electron beam before reaching an inspection object such as a deposition in a sample or the like and reflecting electrons or the like generated from the deposition. SOLUTION: The sample retainer is composed of a membrane 44 of a which at least one part of a wall of a sample holding space 49 where the sample is supported is transmitted by the electron beam 1, and is provided with an aluminum layer 43 and an aluminum electrode 46 to form an electric field in the sample holding space 49. The inspection object 73 in the sample is shifted by the formed electric field and contacts with the membrane 44. As a result, when the electron beam 1 is irradiated on the sample through the membrane, dispersion of the electron beam 1 generated before reaching the inspection object 73 can be minimized and an excellent SEM image can be acquired. COPYRIGHT: (C)2008,JPO&INPIT
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