| 摘要 |
PROBLEM TO BE SOLVED: To surely eliminate static electricity from a package surface of a semiconductor device. SOLUTION: A packaged semiconductor device 12 is carried to an atomizer 10 by a carrier 13. The atomized alcohol 30 is sprayed to a package surface 12a of the semiconductor device 12 from the atomizing portion 19a of a nozzle gun 19. The static electricity charged on the package surface 12a is eliminated by volatilization of the alcohol. The semiconductor device 12 taken out of the an atomizing chamber 15 is carried to an ionizer 11. Corona discharge is generated in response to a voltage applied to a needle-like electrode 35 by a power source supplier 33. Ions gather around the needle-like electrode 35 by the corona discharge. A blower 34 sends wind 34a to the needle-like electrode 35. Ionized air 40 is applied to the package surface 12a of semiconductor device 12. COPYRIGHT: (C)2008,JPO&INPIT
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