| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of cleaning a brush, in which foreign matter sticking to the brush can be sufficiently removed. Ž<P>SOLUTION: The method of cleaning the brush includes: a step in which the brush 14 having been used for scrubbing cleaning is dipped in cleaning fluid 44 reserved in a cleaning tank 22 and ultrasonic vibrations are applied to the cleaning fluid; and a step in which the brush is rotated in contact with a cleaning substrate 24 provided in the cleaning tank. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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