发明名称 SUBSTRATE TREATING APPARATUS
摘要 The present invention relates to a substrate treating device. According to an embodiment of the present invention, the substrate treating device comprises: a substrate support unit configured to support a substrate; a developer supply unit configured to supply developer to the substrate supported by the substrate support unit; and a heating unit configured to heat an upper surface of the substrate to which the developer is supplied. Therefore, the substrate treating device can efficiently process the substrate.
申请公布号 KR20160083287(A) 申请公布日期 2016.07.12
申请号 KR20140193903 申请日期 2014.12.30
申请人 SEMES CO., LTD. 发明人 JUNG, YOUNG HUN;SEO, KYUNG JIN;YOO, HYE JEONG
分类号 H01L21/027;H01L21/02 主分类号 H01L21/027
代理机构 代理人
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