RECIRCULATION COOLING UNIT AND HEAT TREATMENT APPARATUS HAVING THE SAME

摘要

According to the present invention, a circulation cooling unit and a heat treatment device with the same are disclosed. One side of the circulation cooling unit is connected to a first pipe of a processing chamber and the other side of the circulation cooling unit is connected to a second pipe of the processing chamber to suck a processing gas of the processing chamber, cool the processing gas, and resupply the processing gas to the processing chamber. A supply direction of the processing gas is alternately switched between a first direction and a second direction wherein the processing gas is sucked from the first pipe and supplied to the second pipe in the first direction and the processing gas is sucked from the second pipe and supplied to the first pipe in the second direction.