发明名称 VIBRATION MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vibration measurement device capable of correctly detecting vibration.SOLUTION: The vibration measurement device includes a light source for emitting a laser beam, a first mirror, a sensor part, an optical part and an operation unit. The optical part performs a first movement in which first light that is a first part of the laser beam is reflected on the first mirror and on an object, and then on the first mirror so as to enter the sensor part, and a second movement in which second light that is a second part of the laser beam is reflected on the first mirror so as to enter the sensor part without entering the object. The operation unit derives vibration of the object on the basis of the first light detected by the sensor part, the second light detected by the sensor part and third light that is a third part of the laser beam detected by the sensor part.SELECTED DRAWING: Figure 1
申请公布号 JP2016176696(A) 申请公布日期 2016.10.06
申请号 JP20150054758 申请日期 2015.03.18
申请人 TOSHIBA CORP 发明人 OHASHI TAKUJI;NISHINO TOMOKO;NAKAYAMA MICHIO
分类号 G01H9/00 主分类号 G01H9/00
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