Isolated semiconductor layer over buried isolation layer

摘要

An integrated circuit may be formed by forming an isolation recess in a single-crystal silicon-based substrate. Sidewall insulators are formed on sidewalls of the isolation recess. Thermal oxide is formed at a bottom surface of the isolation recess to provide a buried isolation layer, which does not extend up the sidewall insulators. A single-crystal silicon-based semiconductor layer is formed over the buried isolation layer and planarized to be substantially coplanar with the substrate adjacent to the isolation recess, thus forming an isolated semiconductor layer over the buried isolation layer. The isolated semiconductor layer is laterally separated from the substrate.

主权项

1. A method of forming an integrated circuit, comprising the steps:
providing a substrate comprising silicon-based single-crystal semiconductor material; forming an isolation recess in the substrate; forming sidewall insulators at sides of the isolation recess; forming a buried isolation layer of thermal oxide at least 100 nanometers thick at a bottom of the isolation recess by a thermal oxidation process, so that the buried isolation layer does not extend up along interior lateral surfaces of the sidewall insulators, a top surface of the buried isolation layer being lower than a top surface of the substrate adjacent to the isolation recess; and forming an isolated semiconductor layer over the buried isolation layer and separated from the substrate at lateral surfaces of the substrate above the buried isolation layer by the sidewall insulators, a top surface of the isolated semiconductor layer being substantially coplanar with the a top surface of the substrate adjacent to the buried isolation layer; wherein the step of forming the isolated semiconductor layer comprises the steps: forming a seed layer of single-crystal silicon-based semiconductor material on the top surface of the substrate by an epitaxy process; forming a layer of polysilicon over the top surface of the substrate, contacting the seed layer and extending into the isolation recess over the buried isolation layer; and performing a radiant-induced recrystallization process which heats the polysilicon so as to crystallize the polysilicon to form a single-crystal semiconductor layer over the buried isolation layer.