发明名称 ANTI-CONTAINMENT TREATING COMPOSITION, TREATING APPARATUS, TREATING METHOD AND TREATED ARTICLE
摘要 PROBLEM TO BE SOLVED: To provide a novel surface treating agent capable of forming a layer with higher alkali-resistance.SOLUTION: The surface treating agent contains a fluoro-containing compound having a carbon-carbon unsaturated bond at the end of the molecule as a group represented by -Y-A (in formula, Y represents a single bond, an oxygen atom or a divalent organic group, A represents -CH=CHor -C≡CH).SELECTED DRAWING: Figure 1
申请公布号 JP2016183319(A) 申请公布日期 2016.10.20
申请号 JP20150144582 申请日期 2015.07.22
申请人 DAIKIN IND LTD;TOKYO ELECTRON LTD 发明人 ITAMI YASUO;FUSE SATOSHI;OKKOTSU MADOKA;KINOSHITA HIDETOSHI;FUKASAWA TATSUYA
分类号 C09K3/18;B32B27/30;C09D5/00;C09D5/16;C09D171/00 主分类号 C09K3/18
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