发明名称 |
ANTI-CONTAINMENT TREATING COMPOSITION, TREATING APPARATUS, TREATING METHOD AND TREATED ARTICLE |
摘要 |
PROBLEM TO BE SOLVED: To provide a novel surface treating agent capable of forming a layer with higher alkali-resistance.SOLUTION: The surface treating agent contains a fluoro-containing compound having a carbon-carbon unsaturated bond at the end of the molecule as a group represented by -Y-A (in formula, Y represents a single bond, an oxygen atom or a divalent organic group, A represents -CH=CHor -C≡CH).SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016183319(A) |
申请公布日期 |
2016.10.20 |
申请号 |
JP20150144582 |
申请日期 |
2015.07.22 |
申请人 |
DAIKIN IND LTD;TOKYO ELECTRON LTD |
发明人 |
ITAMI YASUO;FUSE SATOSHI;OKKOTSU MADOKA;KINOSHITA HIDETOSHI;FUKASAWA TATSUYA |
分类号 |
C09K3/18;B32B27/30;C09D5/00;C09D5/16;C09D171/00 |
主分类号 |
C09K3/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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