发明名称 DICING TAPE-INTEGRATED FILM FOR SEMICONDUCTOR BACK SURFACE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dicing tape-integrated film for a semiconductor back surface, usable from a dicing process of a semiconductor wafer to a flip-chip bonding process of a semiconductor chip.SOLUTION: A dicing tape-integrated film for a semiconductor back surface includes: a dicing tape comprising an adhesive layer on a base material; and a flip chip type film for a semiconductor back surface provided on the adhesive layer. In the dicing tape-integrated film for a semiconductor back surface, the peeling force (temperature: 23°C, peeling angle: 180°, tensile rate: 300 mm/min) between the adhesive layer of a dicing tape and the flip chip type film for a semiconductor back surface is 0.05-1.5 N/20 mm, the light transmittance of the flip chip type film for a semiconductor back surface is 20% or less, and the flip chip type film for a semiconductor back surface is colored.SELECTED DRAWING: Figure 1
申请公布号 JP2016197726(A) 申请公布日期 2016.11.24
申请号 JP20160113728 申请日期 2016.06.07
申请人 NITTO DENKO CORP 发明人 TAKAMOTO HISAHIDE;MATSUMURA TAKESHI;SHIGA GOSHI
分类号 H01L21/301;C09J7/02;C09J201/00;H01L21/60 主分类号 H01L21/301
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