Ceramic heater

摘要

A ceramic heater having a heating element of a sintered mixture comprising alumina and titanium nitride and/or titanium carbide. The heating element has a specific resistance in a range from 10-4 to several OMEGA cm. The ceramic heater may have supporting substrates of insulating materials with which the heating element is covered. The ceramic heater can be used at a temperature above 1000 DEG C.