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经营范围
发明名称
PLASMA ASHING DEVICE
摘要
申请公布号
JPH02183525(A)
申请公布日期
1990.07.18
申请号
JP19890002044
申请日期
1989.01.10
申请人
ULVAC CORP
发明人
KIKUCHI MASASHI;WATABE TOKUO;TAKADA TOSHINARI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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