| 摘要 |
A sense element is provided which has a boron doped silicon body positioned above and parallel to a substrate with a plurality of openings extending through the semiconductive body, the plurality of openings producing a damping such that the natural frequency and the measurement bandwidth of the sense element are modified. Also provided is a capacitive sense element for an accelerometer having a dielectric substrate with at least two fixed conductive plates thereon, a boron doped silicon body positioned above and parallel to the substrate, the body having a pedestal attached to the substrate and surrounded by an internal opening in the body, a first upper plate and a second upper plate corresponding to the fixed conductive plates to form a first and a second capacitor, and a pair of oppositely directed torsion arms connecting the body to the pedestal and forming a flexure axis around which the first and second upper plates deflect in response to an acceleration normal to the sense element to produce a difference between the capacitances of the first and second capacitors.
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