| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type physical quality sensor which can prevent the melting integration of a movable electrode and a fixed electrode, in the anode jointing time. SOLUTION: On the surface of the first glass substrate 2, the first fixed electrode 9 and equipotential poles 13 are provided, while a recess 14 is provided on the surface of a weight part 6 opposing to the fixed electrode 9. The equipotential poles 13 are mode in the same potential with the weight part 6, and also with a movable electrode 7 on the surface of the weight part 6, accordingly. And the distance between a silicon substrate 1 and the equipotential poles 13 is made shorter than the distance between the weight part 6 and the fixed electrode 9. Consequently, even though an electrostatic attraction is generated between the fixed electrode 9 and the movable electrode 7 (the surface of the weight) when the silicon substrate 1 and the first glass substrate 2 is anode jointed, and the weight part 6 is drawn to the fixed electrode 9, the weight part 6 is contacted to the equipotential poles 13 at first, and does not contact with the fixed electrode 9. As a result, there is no potential difference between the weight part 6 and the equipotential poles 13, no current flows, and no arc discharge is generated. And, since both electrodes are not contacted, both electrodes are never fused. |
