| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an element having a fine shape surface, capable of manufacturing the element especially large in the aspect ratio (groove depth/groove width) of the fine shape at a low cost without damaging the fine projected parts (fine groove transfer parts) formed on the surface of the element, and the element manufactured by this method. SOLUTION: The fine shape is formed to a resist material and this resist material is used as a mold to mold a liquid ultraviolet curable resin or thermosetting resin and, after the molded resin is cured, the resist material used as the mold is removed by wet etching to manufacture the element having the fine shape large in aspect ratio. |
