| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an infrared detection type gas sensor with reduced physique size and dispersion of sensor sensitivity. <P>SOLUTION: A sensor chip 3, as one sensor chip, is formed by integrating a light source part 31 having a resistor 60 and for emitting an infrared ray by heating the resistor 60, and a photoreception part 32 having a thermocouple as a detecting element 70, on the same substrate 40. The sensor chips 30 are arranged in prescribed positions opposed to a concave mirror 12b provided on an upper inner face of a case 10 to form a gas sensor 100. The physique of the gas sensor 100 is reduced since an arranging space inside the case is reduced compared with the photoreception part 32 having another chip. Positional precisions of the light source part 31 and the photoreception part 32 with respect to the concave mirror 12b are enhanced because a positional relation between the light source part 31 and the photoreception part 32 is determined. The dispersion of the sensor sensitivity is reduced thereby. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
