| 摘要 |
PROBLEM TO BE SOLVED: To maintain optimal contact positions of probe needles at all times by appropriately correcting position displacements of the contact positions of the probe needles even in the case that the probe needles come into contact with one electrode pad a plurality of times. SOLUTION: A probe inspection apparatus 100 acquires pre-contact images 51 and post-contact images 52 of a probe needle 8a to each pad 40 of a chip 30 by imaging by a CCD camera 6, extracts differential images 53 between both images by an image processing PC 10, computes the amount of position displacement between the position of the newest needle track 41b and a target position in the differential images 53 for respective thirty pads computes an overall amount of correction of a probe card 8 on the basis of each amount of position displacement, and corrects position displacements by reflecting the amount of correction in inspections of each pad 40 of the chip 30 to be inspected. COPYRIGHT: (C)2008,JPO&INPIT
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