INCORPORATION OF PHASE MAP INTO FAST MODEL-BASED OPTICAL PROXIMITY CORRECTION SIMULATION KERNEL TO ACCOUNT FOR SHORT AND MIDDLE-RANGE FLARE

摘要

PROBLEM TO BE SOLVED: To provide a method for computing a phase map within an optical proximity correction simulation kernel.

SOLUTION: A first method utilizes simulated wavefront information from randomly generated data. A second method uses measured data from optical tools. A phase map is created by analytically embedding a randomly generated two-dimensional array comprising complex numbers of wavefront information, and performing an inverse Fourier transform on the resultant array. A filtering function requires the amplitude of each element of the array to be multiplied by a Gaussian function. A power law is then applied to the array. The elements of the array are shuffled, and converted from a phasor form to a real/imaginary form. A two-dimensional fast Fourier transform is applied. The array is then unshuffled and converted back to the phasor form.

COPYRIGHT: (C)2005,JPO&NCIPI