MANUFACTURING APPARATUS AND METHOD OF FILM WITH A BARRIER PROPERTY

摘要

An apparatus for manufacturing a film having barrier property is provided to form an inorganic thin film layer at one side through whole width and length evenly. An apparatus for manufacturing a film (22) having barrier property comprises: a vacuum chamber in which a plastic film (20) moves; a gas supplying pipe which provides deposition gas to inside of vacuum chamber; and a material retaining device which maintains a deposition material for depositing reactant on a plastic film. The gas supplying pipe comprise double pipe having an inner pipe which is filled with deposition gas and outer pipe which discharges deposition gas from the inner pipe.