Arrays of integrated analytical devices and methods for production

摘要

Arrays of integrated analytical devices and their methods for production are provided. The arrays are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The integrated devices allow the highly sensitive discrimination of optical signals using features such as spectra, amplitude, and time resolution, or combinations thereof. The arrays and methods of the invention make use of silicon chip fabrication and manufacturing techniques developed for the electronics industry and highly suited for miniaturization and high throughput.

主权项

1. A method for producing an array of integrated analytical devices comprising:
providing a substrate layer; depositing a filter module layer on the substrate layer; depositing a collection module layer on the filter module layer, wherein the collection module layer comprises a Fresnel lens structure configured to split a light beam into a plurality of light beams; depositing a first layer of waveguide cladding material on the collection module layer; depositing a waveguide core material on the first layer of waveguide cladding material; depositing a second layer of waveguide cladding material on the waveguide core material to form an upper cladding and to complete a waveguide module layer; depositing a zero-mode waveguide material on the surface of the waveguide module layer to form a zero-mode waveguide module layer; patterning and etching the zero-mode waveguide module layer to define a plurality of nanometer-scale apertures penetrating into the upper cladding of the waveguide module layer.