Smooth seed layers with uniform crystalline texture for high perpendicular magnetic anisotropy materials

摘要

A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.

主权项

1. A perpendicular magnetic tunnel junction (pMTJ) device, comprising:
a seed layer directly on a surface of a first electrode of the pMTJ device, the seed layer having a uniform predetermined crystal orientation at least along a growth axis and a substantially planar surface; a magnetic material on the substantially planar surface of the seed layer; a texture breaking layer on the magnetic material; and a spin polarizing layer on the texture breaking layer.