Imprint apparatus

摘要

An imprint apparatus molds an uncured resin on a substrate and cures the resin to form a pattern of the cured resin on the substrate. The apparatus includes a mold holding unit that holds the mold, a substrate holding unit that holds the substrate, a deforming unit that deforms the mold held by the mold holding unit into a convex shape toward the substrate, a driving unit that changes an attitude of the mold or the substrate during a releasing operation in which the mold deformed into the convex shape is released from the resin to thereby make the position of a contact region at which the mold is brought into contact with the resin movable, a measuring unit that acquires image information indicating a state of the contact region, and a control unit configured to control the operation of the driving unit based on the image information.

主权项

1. An imprint apparatus that molds an imprint material on a substrate using a mold and cures the imprint material to thereby form a pattern of the imprint material on the substrate, the imprint apparatus comprising:
a mold holding mechanism configured to hold the mold; a substrate holding unit configured to hold the substrate; a deforming unit configured to deform the mold held by the mold holding mechanism into a convex shape toward the substrate; a measuring unit configured to obtain an image of a contact region at which the mold deformed into the convex shape is brought into contact with the imprint material; a driving unit configured to change a position of the contact region; and a control unit configured to calculate a plane coordinate of a centroid of the contact region based on the image and to control the operation of the driving unit based on the image acquired by the measuring unit during a releasing operation in which the mold is released from the imprint material such that the plane coordinate position of the centroid is directed toward a pre-acquired plane coordinate position of the center of a pattern-forming region on the substrate.