| 摘要 |
An inspection device, method and system. The device comprises: a distributed radiation source (110) which comprises a plurality of source points; a light source collimator (120) which is arranged at a ray beam emergence end of the distributed radiation source, and aggregates rays generated thereby along a fan-shaped radial line, so as to form a reverse fan-shaped ray beam; a scattering collimator (140) which is configured to only permit scattered rays which have one or more specific scattering angles and are generated by the interaction of rays and an object (130) under inspection to pass through; at least one detector (150) which is arranged in the downstream position of the scattering collimator, each detector comprising a plurality of detection units, and the plurality of detection units having an energy resolution capability and being basically arranged on a cylindrical surface, so as to receive the scattered rays which pass through the scattering collimator; and a processing apparatus (160) which calculates energy spectrum information about the scattered rays of the object under inspection based on a signal which is output by the detector. The device measures the energy distribution of scattered X-rays at a fixed angle by using a detector having the energy resolution capability, so as to obtain the lattice constant of a substance, thereby distinguishing the category of the substance. |
