| 摘要 |
A temperature difference measuring apparatus that is provided with: a bottomed cylindrical package that opens at a top surface side thereof; a MEMS device that is arranged upon an inner bottom surface of the package and that has one or more thermopiles that measure the temperature difference generated inside the device by heat that flows in through a bottom part of the package; and a heat quantity increasing means that increases the quantity of heat that flows out from the MEMS device to the top surface side of the package. |
