Fabrication of optical elements and modules incorporating the same

摘要

Fabricating a wafer-scale spacer/optics structure includes replicating optical replication elements and spacer replication sections directly onto an optics wafer (or other wafer) using a single replication tool. The replicated optical elements and spacer elements can be composed of the same or different materials.

主权项

1. A method of fabricating a wafer-scale spacer/optics structure, the method comprising:
providing a replication tool having optical element replication sections and spacer replication sections; using the replication tool to form negatives of the optical element replication sections on a wafer so as to provide replicated optical elements of a first material; and injecting a liquid, viscous or plastically deformable material into the spacer replication sections of the replication tool to form negatives of the spacer replication sections on the wafer so as to provide replicated spacer elements of a second material different from the first material.