Substrate processing and alignment

摘要

A substrate can efficiently be manufactured by separating the alignment and the actual processing when an alignment mark is provided, which is fixed with respect to the substrate and when position information on a position of a process area on the substrate is retrieved with respect to the alignment mark before the substrate is processed. During the processing alignment can then be performed by redetermining the position of the alignment mark only once and by using the stored position information on the position of the process area.

主权项

1. A method for manufacturing a device using a substrate having a surface, the method comprising:
providing at least one alignment mark on one of the substrate or a substrate support to which the substrate is mounted; determining a position of the at least one alignment mark being fixed with respect to the substrate, wherein the at least one alignment mark is not located in an area of the substrate which is processed during manufacturing using a nano-imprinting technique and wherein a coordinate system is defined when the position of the at least one alignment mark is determined in which to derive position information of at least first and second process areas; determining position information for the position of the first process area on the surface of the substrate which is processed during manufacturing and for the position of the second process area on the surface of the substrate which is processed during manufacturing with respect to the at least one alignment mark, wherein determining the position information for the process areas with respect to the at least one alignment mark comprises identifying previously applied structures within the first and the second process areas by comparing topographic information obtained by scanning the respective process areas on the surface of the substrate with stored reference-topographic information, and storing the determined position information as stored position information and wherein, since the topographic information is scanned within the defined coordinate system, two two-dimensional vectors in the defined coordinate system pointing to two edges of the first process area are derived to provide the position information for the position of the first process area and stored; redetermining the position of the at least one alignment mark within a process coordinate system for a manufacturing process, wherein relative orientation of the defined coordinate system with respect to the process coordinate system is characterized by at least one translation vector and at least one rotation angle; aligning the position of the first process area within the manufacturing process using information derived from the redetermined position of the at least one alignment mark and from the stored position information for the position of the first process area by transforming the two stored position vectors into the process coordinate system utilizing the at least one translation vector and the at least one rotation angle; processing the first process area using a nano-imprinting technique; aligning the second process area using information derived from the stored position information for the position of the second process area; and processing the second process area using the nano-imprinting technique; wherein the stored position information is transferred together with the substrate.