发明名称 Laser-sustained plasma light source
摘要 A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.
申请公布号 US9516733(B1) 申请公布日期 2016.12.06
申请号 US201514814636 申请日期 2015.07.31
申请人 KLA-Tencor Corporation 发明人 Bezel Ilya;Shchemelinin Anatoly;Zhao Yanming;Delgado Gildardo R.
分类号 H01J1/02;H05H1/24;H01J61/09;H01J23/033 主分类号 H01J1/02
代理机构 Luedeka Neely Group, P.C. 代理人 Luedeka Neely Group, P.C. ;Barnes Rick
主权项 1. A method for producing a laser sustained plasma light, the method comprising the steps of: directing at least one laser into a gas volume, igniting a plasma in the gas volume, the plasma producing a light, removing heated portions of the gas volume from the plasma, cooling the heated portions of the gas volume, returning the cooled portions of the gas volume to the plasma in a laminar flow, and collecting the light with a reflector and providing the light to a desired location.
地址 Milpitas CA US