发明名称 |
Laser-sustained plasma light source |
摘要 |
A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location. |
申请公布号 |
US9516733(B1) |
申请公布日期 |
2016.12.06 |
申请号 |
US201514814636 |
申请日期 |
2015.07.31 |
申请人 |
KLA-Tencor Corporation |
发明人 |
Bezel Ilya;Shchemelinin Anatoly;Zhao Yanming;Delgado Gildardo R. |
分类号 |
H01J1/02;H05H1/24;H01J61/09;H01J23/033 |
主分类号 |
H01J1/02 |
代理机构 |
Luedeka Neely Group, P.C. |
代理人 |
Luedeka Neely Group, P.C. ;Barnes Rick |
主权项 |
1. A method for producing a laser sustained plasma light, the method comprising the steps of:
directing at least one laser into a gas volume, igniting a plasma in the gas volume, the plasma producing a light, removing heated portions of the gas volume from the plasma, cooling the heated portions of the gas volume, returning the cooled portions of the gas volume to the plasma in a laminar flow, and collecting the light with a reflector and providing the light to a desired location. |
地址 |
Milpitas CA US |