RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE:To provide a radiation sensitive resin compsn. having high resolution and high sensitivity, capable of forming a satisfactory resist pattern, also having such high acid resistance that the compsn. is not affected by an etching soln. and high adhesive property to a substrate and useful as a negative type photoresist. CONSTITUTION:This radiation sensitive resin compsn. contains novolak resin, a compd. capable of crosslinking the novolak resin, a radiation sensitive acid generating agent and at least one of epoxy resin and a silane coupling agent.