| 摘要 |
PURPOSE:To measure an electron-beam diffraction intensity distribution in an on-line manner and precisely. CONSTITUTION:The title apparatus is constituted of a transmission electron microscope 1, of a fluorescent screen 6 which changes an electron-beam diffraction image 4 into an optical image, of a means 7 which introduces the optical image of the fluorescent screen into a CCD camera, of a cooling-type CCD camera 9 which picks up the optical image, of a means 11 which A/D-converts an electric signal obtained by the CCD camera and which inputs the signal to a computer, of a computer 12 which analyzes an electron-beam diffraction intensity distribution and of display means 14, 17 which output its analyzed result. |
