| 摘要 |
PURPOSE: To provide an X-ray generator capable of obtaining a spectrum having a peak in a soft X-ray zone (for example, a zone in the neighborhood of 13nm, or a value between 2.4 and 4.2nm), and reducing scattered particles (particularly scattered particles having a relatively large size). CONSTITUTION: In this X-ray generator, an excitation energy beam 201 is irradiated to a target member 211 in a decompressed vacuum vessel, thereby forming a plasma 203, and an X-ray is taken out from the plasma 203. The member 211 has a metal body or layer of metallic material with a relatively high fusion point, as well as a metal layer of metallic material with a relatively low fusion point formed on the metal body or layer. Also, the thickness of the metal layer with a low fusion point is between 0.1 and 20μm. |
