ROTARY SURFACE PROCESSOR FOR SUBSTRATE

摘要

PURPOSE: To provide a device which can make effective use of installation space and becomes advantageous in the transfer operation of a substrate. CONSTITUTION: An outer cup 50 surrounds a cut 14 which prevents the splash of processing liquid supplied onto the surface of a substrate from scattering to surroundings, being arranged to surround the side and the downside of a substrate which rotates, being retained with a spin chuck 10. The outer cup 50 is made so that the plan form may be quadrangular, and each inner face of the peripheral wall 54 of the outer cup 50 is brought to contact with or close to the periphery of the cup 14. They are arranged so that clean air of down flow may be taken into the ventilation path 52 between the external periphery of the cup 14 and the inner side face of the peripheral wall of the outer cup 50.