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申请公布号
JP2560028(B2)
申请公布日期
1996.12.04
申请号
JP19870109849
申请日期
1987.05.07
申请人
SHINGIJUTSU KAIHATSU JIGYODAN
发明人
HIRAI TOSHIO;GOTO TAKASHI;MUKODA MASAKAZU
分类号
C01B35/04;C23C16/38;(IPC1-7):C23C16/38
主分类号
C01B35/04
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代理人
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