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发明名称
摘要
申请公布号
JP2560030(B2)
申请公布日期
1996.12.04
申请号
JP19870112967
申请日期
1987.05.09
申请人
FUJITSU LTD
发明人
KONO MASANOBU;NISHIZAWA TAKESHI
分类号
H01L21/31;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/31
代理机构
代理人
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