发明名称 METHOD FOR DETECTING WIRE IN WIRE BONDING
摘要 PROBLEM TO BE SOLVED: To provide a method for detecting a wire in wire bonding wherein a position of wire is accurately detected after wire bonding. SOLUTION: Relating to a method for detecting position of wires 6b and 6c after wire bonding by image recognition, a long check area 21e in the longitudinal direction of the wire 6c is set on a screen in accordance with an inclination of the wire 6c, which is to be detected, on a projection plane while the check area 21e is moved in such direction as crossing the wire 6c (arrow b), the position of the wire 6c is detected based on an image brightness of it in a check area 21f. With the use of such shape of check area as this, the noise in the image is significantly reduced while such effect as caused by defocus of a wire image is reduced, so that a position of wire on the screen is detected with high reliability.
申请公布号 JPH10339611(A) 申请公布日期 1998.12.22
申请号 JP19970151782 申请日期 1997.06.10
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MATSUZAKI HIROFUMI
分类号 G01B11/00;H01L21/66 主分类号 G01B11/00
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