TRANSPORTING APPARATUS USED AT PLASMA ETCHING,申请号KR19910021758-传众专利搜索

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发明名称	TRANSPORTING APPARATUS USED AT PLASMA ETCHING
摘要
申请公布号	KR100245572(B1)	申请公布日期	2000.02.15
申请号	KR19910021758	申请日期	1991.11.29
申请人	TOKYO ELECTRON LIMITED	发明人	GANEKO, SATOSHI
分类号	B25J9/00;B25J9/06;H01L21/677;H01L21/687;(IPC1-7):H01L21/64;H01L21/68	主分类号	B25J9/00
代理机构		代理人
主权项
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