发明名称 Process for manufacturing an EEPROM having a peripheral transistor with thick oxide
摘要 A process for manufacturing an integrated circuit provides for the formation of a matrix of floating-gate non-volatile memory cells having dual polysilicon levels, with the two polysilicon levels being isolated by a gate dielectric layer (4) and an interpoly dielectric layer (9) therebetween, and for the concurrent formation of one type of thick-oxide transistor (21) having an active area (7) in regions peripheral to the matrix. The process of the invention provides for removal, during the step of defining the first-level polysilicon (5), the polysilicon (5) from the active area (7) of the thick-oxide transistor (21), so that the gate oxide of the transistor (21) results from the superposition of the first (4) and second (9) dielectric layers.
申请公布号 US6156610(A) 申请公布日期 2000.12.05
申请号 US19970840327 申请日期 1997.04.28
申请人 SGS-THOMASON MICROELECTRONICS S.R.L. 发明人 ROLANDI, PAOLO
分类号 H01L21/8247;H01L27/105;(IPC1-7):H01L21/823;H01L21/336;H01L29/792 主分类号 H01L21/8247
代理机构 代理人
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