| 摘要 |
There is provided a cassette case for holding a plurality of substrates therein, including a cassette case for holding a plurality of substrates therein, including (a) a three-dimensional, hollow frame, and (b) a pair of substrate support members spaced away from each other and carried at the frame with at least one substrate being supported therebetween in the frame. The substrate support members are fixedly carried at the frame at one of longitudinal ends thereof, and at the other of the longitudinal ends thereof so that so that the members are able to expand or contract in a length-wise direction thereof. The above mentioned cassette case ensures that even if the substrate support members thermally expand when the cassette case is thermally treated, there is nothing which obstructs thermal expansion of the substrate support members. Thus, it is possible to eliminate deformation of the substrate support members caused by obstruction to thermal expansion of the substrate support members. As a result, it is possible to solve the problem in a conventional cassette case that a substrate could not be inserted into or taken out of the substrate support members because of deformation of the substrate support members.
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