发明名称 |
A NANOTUBE-BASED ELECTRON EMISSION DEVICE AND SYSTEMS USING THE SAME |
摘要 |
A device that produces an electron beam with high optical quality for processing a sample, is presented. The optical quality is manifested by very high brightness and low energy spread. The device includes an electron source device comprising an electrode in the form of a shaped first layer, preferably in the form of a conducting crater carrying at least one nanotube, and an extracting electrode, which is formed with at least one aperture and is insulated from the first layer. The source can be used in any column that requires such properties. The column according to the invention may be a full size or a miniature electron microscope, a lithography tool, a tool used for direct writing of wafers or a field emission display. |
申请公布号 |
WO0184130(A2) |
申请公布日期 |
2001.11.08 |
申请号 |
WO2001IL00385 |
申请日期 |
2001.04.30 |
申请人 |
EL-MUL TECHNOLOGIES LTD.;EITAN, GUY;ZIK, ORY;ROSENBLATT, DAVID |
发明人 |
EITAN, GUY;ZIK, ORY;ROSENBLATT, DAVID |
分类号 |
B82B3/00;G01N23/04;H01J1/304;H01J29/04;H01J37/06;H01J37/073;H01J37/28;H01J37/305;H01L21/027 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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