| 摘要 |
A PFCs(Perfluoro-Compounds) gas scrubber having both a high temperature plasma decomposition layer and an absorption/decomposition layer is provided to treat the PFCs gas and the acidic gas at the same time by treating the acidic gas in a canister when an acidic gas is generated in a process of treating PFCs gas in a high temperature plasma scrubber. In a scrubber having a high temperature plasma decomposition layer for treating PFCs gas, a PFCs gas scrubber having both a high temperature plasma decomposition layer and an absorption/decomposition layer is characterized in that a canister having an absorption/decomposition layer for treating gas exhausted from the scrubber is additionally installed. The canister has an adsorbent filling layer(12) installed therein, and includes perforated plates installed on a top part and a bottom part of the adsorbent filling layer respectively, a gas inflow port(15) installed under the lower perforated plate(11), and a gas exhaust port(16) installed on a top part of the canister above the upper perforated plate(13). The canister is made of stainless steel. The canister further has wheels(14) installed on a bottom face thereof.
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