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经营范围
发明名称
Processing chamber
摘要
申请公布号
EP1316388(B2)
申请公布日期
2009.03.04
申请号
EP20020024138
申请日期
2002.10.30
申请人
TEAMTECHNIK MASCHINEN UND ANLAGEN GMBH
发明人
REINISCH, HUBERT, DR.;WEILER, THOMAS;RUDERT, MICHAEL
分类号
B23Q1/01;B23Q37/00;B23Q11/08;B23Q41/04
主分类号
B23Q1/01
代理机构
代理人
主权项
地址
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