WAFER INSPECTION EQUIPMENT HAVING LASER CLEANING FUNCTION

摘要

Disclosed is a wafer inspection equipment for inspecting a semiconductor wafer. The wafer inspection equipment comprises: a main body which defines a chamber on the inside thereof, a probe card being disposed at the top of the chamber; a chuck which fastens a wafer within the chamber; a moving unit which moves the chuck within the chamber and selectively brings the probe card into contact with the wafer; and a laser cleaning device which cleans the probe card within the chamber using a laser beam only if the probe card does not come into contact with the wafer.