CRYOPUMP SYSTEM, CONTROLLING APPARATUS FOR CRYOPUMP, AND REGENERATION METHOD OF CRYOPUMP

摘要

The present invention provides a cryopump system, a cryopump control apparatus and a cryopump regeneration method to reduce the regeneration time of a cryopump. The cryopump system comprises: a cryopump (10); and a regeneration control unit (102) to control the cryopump according to a regeneration sequence including a discharge process, which is a discharge process to discharge condensate from the cryopump (10), to execute roughing of the cryopump. The regeneration control unit (102) comprises: a pressure drop operation unit (114) to operate a pressure drop rate in the cryopump during roughing of the cryopump; and a pressure drop rate monitoring unit (116) to detect reduction of the pressure drop rate during roughing.