| 摘要 |
The present invention relates to a manufacturing method for a bipolar electrostatic chuck, which performs thermal spray coating by masking a heat resistant tape having adhesiveness when an electrode layer of a bipolar electrostatic chuck is formed. To achieve this, the manufacturing method for a bipolar electrostatic chuck comprises: a step of processing a susceptor; a step of forming an insulation layer on the surface of the susceptor through thermal spray coating; a step of forming the electrode layer according a pre-patterned film shape by attaching a pre-patterned electrode layer film to the surface of the insulation layer and performing thermal spray coating; a step of forming a dielectric layer on the surface of the electrode layer through thermal spray coating; and a step of grinding and sealing the surface of the dielectric layer. |
